Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry

Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry

Interferometers are widely used in industry for surface profiling of microsystems. It can be used to inspect both smooth (reflective) and rough (scattering) surfaces in wide range of sizes. If the object surface is smooth, the interference between reference and object beam results in visible fringes...

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書目詳細資料
Main Authors:	Upputuri, Paul Kumar, Rajendran, Praveenbalaji, Pramanik, Manojit
其他作者:	School of Chemical and Biomedical Engineering
格式:	Conference or Workshop Item
語言:	English
出版:	2021
主題:	Engineering::Bioengineering Dual-wavelength Interferometry
在線閱讀:	https://hdl.handle.net/10356/146467
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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