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Zou, Yiming, Chunyu Cheng, Yuanyuan Guo, Amanda Jiamin Ong, Ronn Goei, Shuzhou Li, Alfred Iing Yoong Tok, and School of Materials Science and Engineering. Atomic Layer Deposition of Rhodium and Palladium Thin Film Using Low-concentration Ozone. 2022.

Zou, Yiming, et al. Atomic Layer Deposition of Rhodium and Palladium Thin Film Using Low-concentration Ozone. 2022.