A new look of dispatching for multi-objective interbay AMHS in semiconductor wafer manufacturing: A T–S fuzzy-based learning approach

• المؤلفون الرئيسيون: Li, Hua, Jin, Zhenghong
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2025
• الموضوعات: Engineering; Wafer fab AMHS; Multi-objective optimization
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/183047
• المؤسسة: Nanyang Technological University

Semiconductor wafer fabrication systems (SWFS) are among the most intricate discrete processing environments globally. Since the costs associated with automated material handling systems (AMHS) within fabs account for 20%–50% of manufacturing expenses, it is crucial to enhance the efficiency of mate...