APA Citation

Ee, E. Y. C., & Zhong, C. (2010). Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films.

Chicago Style Citation

Ee, Elden Yong Chiang, and Chen Zhong. Plasma Assisted Deposition of Ti-Si-N and Ti-Si-N-O Diffusion Barrier Films. 2010.

MLA Citation

Ee, Elden Yong Chiang, and Chen Zhong. Plasma Assisted Deposition of Ti-Si-N and Ti-Si-N-O Diffusion Barrier Films. 2010.

Warning: These citations may not always be 100% accurate.