Ee, E. Y. C., & Zhong, C. (2010). Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films.
استشهاد بنمط شيكاغوEe, Elden Yong Chiang, و Chen Zhong. Plasma Assisted Deposition of Ti-Si-N and Ti-Si-N-O Diffusion Barrier Films. 2010.
MLA استشهادEe, Elden Yong Chiang, و Chen Zhong. Plasma Assisted Deposition of Ti-Si-N and Ti-Si-N-O Diffusion Barrier Films. 2010.
تحذير: قد لا تكون هذه الاستشهادات دائما دقيقة بنسبة 100%.