Ee, E. Y. C., & Zhong, C. (2010). Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films.
Chicago Style CitationEe, Elden Yong Chiang, and Chen Zhong. Plasma Assisted Deposition of Ti-Si-N and Ti-Si-N-O Diffusion Barrier Films. 2010.
MLA引文Ee, Elden Yong Chiang, and Chen Zhong. Plasma Assisted Deposition of Ti-Si-N and Ti-Si-N-O Diffusion Barrier Films. 2010.
警告:這些引文格式不一定是100%准確.