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 __   _     ______    _____     _____     _____   
| || | ||  /_   _//  / ____||  |  ___||  / ____|| 
| '--' ||   -| ||-  / //---`'  | ||__   / //---`' 
| .--. ||   _| ||_  \ \\___    | ||__   \ \\___   
|_|| |_||  /_____//  \_____||  |_____||  \_____|| 
`-`  `-`   `-----`    `----`   `-----`    `----`

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Text this: Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films