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  _____    _    _    _    _    __   __    _____   
 /  ___|| | || | || | |  | ||  \ \\/ //  /  ___|| 
| // __   | || | || | |/\| ||   \ ` //  | // __   
| \\_\ || | \\_/ || |  /\  ||    | ||   | \\_\ || 
 \____//   \____//  |_// \_||    |_||    \____//  
  `---`     `---`   `-`   `-`    `-`'     `---`

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Text this: Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films