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           _    _     ______    ______            
  ____    | || | ||  /_   _//  /_   _//     ___   
 |    \\  | || | ||  `-| |,-    -| ||-     /   || 
 | [] ||  | \\_/ ||    | ||     _| ||_    | [] || 
 |  __//   \____//     |_||    /_____//    \__ || 
 |_|`-`     `---`      `-`'    `-----`      -|_|| 
 `-`                                         `-`

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Text this: Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films