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             ___      _____     _____     ______  
    ___     / _ \\   |__  //   |  ___||  /_   _// 
   /   ||  / //\ \\    / //    | ||__      | ||   
  | [] || |  ___  ||  / //__   | ||__     _| ||   
   \__ || |_||  |_|| /_____||  |_____||  /__//    
    -|_|| `-`   `-`  `-----`   `-----`   `--`     
     `-`

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Text this: Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films