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  _____     _____    _____      ______    _____   
 |__  //   |  ___|| |  __ \\   /_   _//  / ____|| 
   / //    | ||__   | |  \ ||   -| ||-  / //---`' 
  / //__   | ||__   | |__/ ||   _| ||_  \ \\___   
 /_____||  |_____|| |_____//   /_____//  \_____|| 
 `-----`   `-----`   -----`    `-----`    `----`

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發送短信 : Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films