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  _____     _____     ______    ______   _    _   
 |__  //   |  ___||  /_____//  /_   _// | || | || 
   / //    | ||__    `____ `    -| ||-  | || | || 
  / //__   | ||__    /___//     _| ||_  | \\_/ || 
 /_____||  |_____||  `__ `     /_____//  \____//  
 `-----`   `-----`   /_//      `-----`    `---`   
                     `-`

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發送短信 : Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films