Growth and characterization of oxide thin films by filtered cathodic vacuum arc and their applications

• المؤلف الرئيسي: Zhao, Zhiwei
• مؤلفون آخرون: Tay Beng Kang
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/4033
• المؤسسة: Nanyang Technological University

This study deals with three kinds of metal oxide thin films, namely zirconium oxide, titanium oxide and aluminium oxide, prepared by filtered cathodic vacuum arc (FCVA). The influences of various process parameters (e.g. working pressure, substrate temperature & bias, etc.) on the film propertie...