Development of silicon carbide thin films for optoelectronic device applications

• 主要作者: Ji, Rong
• 其他作者: Yoon, Soon Fatt
• 格式: Theses and Dissertations
• 出版: 2008
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films; DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• 在線閱讀: http://hdl.handle.net/10356/4461

In this project, the electron cyclotron resonance chemical vapour deposition (ECR-CVD) technique has been used to deposit amorphous (a-SiC:H) and microcrystalline (mc-SiC3-I) films for characterisation of their optical, electrical and structural properties using transmittance/reflectance measuremen...