Characterisation of PolyVinyl Alcohol (PVA) as a water-soluble sacrificial layer for affordable surface micromachining

• 主要作者: Jijo Mathen Varghese
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Final Year Project
• 語言: English
• 出版: 2013
• 主題: DRNTU::Engineering
• 在線閱讀: http://hdl.handle.net/10356/53592
• 機構: Nanyang Technological University

Micro-Electro Mechanical Systems (MEMS) play a significant role in many industries today. These include aerospace, automotive, biomedical, optical display and wireless communication. MEMS are very small devices that can sense, think, communicate and even act. This makes them the backbone of many ind...