Design fundamental technologies self-latching MEMS optical switch with moving polymer waveguides

• المؤلف الرئيسي: Liu, Haobing
• مؤلفون آخرون: Chollet, Franck Alexis
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Manufacturing
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/6052

This research deals with some innovative technologies in MEMS (Micro Electro Mechanical Systems) and a novel optical switch based on them. A micro self-latching bi-stable actuator which is based on two innovative structures: a Fork Hinge structure, and a pre-compressed micro spring, is introduced in...