Theoretical Analysis of Non-ablative Laser Texturing of Silicon Surface with a Continuous Wave Fiber Laser

• Main Authors: Farrokhi, Hamid, Zhou, Wei, Zheng, Hongyu
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2015
• 主題: Non-ablative micro/nano texturing; Thermal analysis; Laser-induced oxidation
• 在線閱讀: https://hdl.handle.net/10356/81273; http://hdl.handle.net/10220/39221

Si is highly transparent to infrared fiber laser (λ=1090 nm) and the laser is not regarded as a suitable tool for ablation based silicon surface texturing. However, we have shown non-ablative texturing of Si surface is possible provided that suitable laser power and dwell time are chosen to produce...