Text this: Efficient approach to cyclic scheduling of single-arm cluster tools with chamber cleaning operations and wafer residency time constraint

 __   _    __   __   _    _    __   __    _  __  
| || | ||  \ \\/ // | |  | ||  \ \\/ //  | |/ // 
| '--' ||   \ ` //  | |/\| ||   \ ` //   | ' //  
| .--. ||    | ||   |  /\  ||    | ||    | . \\  
|_|| |_||    |_||   |_// \_||    |_||    |_|\_\\ 
`-`  `-`     `-`'   `-`   `-`    `-`'    `-` --`