Karuturi, S. K., Liu, L., Su, L. T., Zhao, Y., Fan, H. J., Ge, X., . . . Engineering, S. o. M. S. &. (2011). Kinetics of stop-flow atomic layer deposition for high aspect ratio template filling through photonic band gap measurements.

Karuturi, Siva Krishna, Lijun Liu, Liap Tat Su, Yang Zhao, Hong Jin Fan, Xiaochen Ge, Sailing He, Alfred Iing Yoong Tok, و School of Materials Science & Engineering. Kinetics of Stop-flow Atomic Layer Deposition for High Aspect Ratio Template Filling Through Photonic Band Gap Measurements. 2011.

Karuturi, Siva Krishna, et al. Kinetics of Stop-flow Atomic Layer Deposition for High Aspect Ratio Template Filling Through Photonic Band Gap Measurements. 2011.