APA引文

Karuturi, S. K., Liu, L., Su, L. T., Zhao, Y., Fan, H. J., Ge, X., . . . Engineering, S. o. M. S. &. (2011). Kinetics of stop-flow atomic layer deposition for high aspect ratio template filling through photonic band gap measurements.

Chicago Style Citation

Karuturi, Siva Krishna, Lijun Liu, Liap Tat Su, Yang Zhao, Hong Jin Fan, Xiaochen Ge, Sailing He, Alfred Iing Yoong Tok, and School of Materials Science & Engineering. Kinetics of Stop-flow Atomic Layer Deposition for High Aspect Ratio Template Filling Through Photonic Band Gap Measurements. 2011.

MLA引文

Karuturi, Siva Krishna, et al. Kinetics of Stop-flow Atomic Layer Deposition for High Aspect Ratio Template Filling Through Photonic Band Gap Measurements. 2011.