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 ______     ______              _____     _____   
|      \\  /_   _//     ___    |  ___||  |__  //  
|  --  //   -| ||-     /   ||  | ||__      / //   
|  --  \\   _| ||_    | [] ||  | ||__     / //__  
|______//  /_____//    \__ ||  |_____||  /_____|| 
`------`   `-----`      -|_||  `-----`   `-----`  
                         `-`

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Text this: MEMS-micropumps : a review