APA引文

Liao, H., Goh, L. N. L., Liu, H., Sudijono, J. L., Elgin, Q., Sanford, C., . . . Engineering, S. o. M. S. &. (2013). The impact of etch-stop layer for borderless contacts on deep submicron CMOS device performance: A comparative study.

Chicago Style Citation

Liao, H., L. N. L. Goh, H. Liu, J. L. Sudijono, Q. Elgin, C. Sanford, Pooi See Lee, and School of Materials Science & Engineering. The Impact of Etch-stop Layer for Borderless Contacts On Deep Submicron CMOS Device Performance: A Comparative Study. 2013.

MLA引文

Liao, H., et al. The Impact of Etch-stop Layer for Borderless Contacts On Deep Submicron CMOS Device Performance: A Comparative Study. 2013.