HAQUE, T., & ENGINEERING, M. (2010). Modeling and characterization of abrasive-free copper chemical mechanical planarization process.
Chicago Style CitationHAQUE, TABASSUMUL, and MECHANICAL ENGINEERING. Modeling and Characterization of Abrasive-free Copper Chemical Mechanical Planarization Process. 2010.
MLA引文HAQUE, TABASSUMUL, and MECHANICAL ENGINEERING. Modeling and Characterization of Abrasive-free Copper Chemical Mechanical Planarization Process. 2010.
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