APA Citation

SOO, C. P., LOH, W. B., CHAN, L., & SCIENCE, M. (2012). Simplified dual damascene process utilizing PPMSO as an insulator layer.

Chicago Style Citation

SOO, CHOI PHENG, WYE BOON LOH, LAP CHAN, and MATERIALS SCIENCE. Simplified Dual Damascene Process Utilizing PPMSO As an Insulator Layer. 2012.

MLA Citation

SOO, CHOI PHENG, WYE BOON LOH, LAP CHAN, and MATERIALS SCIENCE. Simplified Dual Damascene Process Utilizing PPMSO As an Insulator Layer. 2012.

Warning: These citations may not always be 100% accurate.