SOO, C. P., LOH, W. B., CHAN, L., & SCIENCE, M. (2012). Simplified dual damascene process utilizing PPMSO as an insulator layer.
Chicago Style CitationSOO, CHOI PHENG, WYE BOON LOH, LAP CHAN, and MATERIALS SCIENCE. Simplified Dual Damascene Process Utilizing PPMSO As an Insulator Layer. 2012.
MLA引文SOO, CHOI PHENG, WYE BOON LOH, LAP CHAN, and MATERIALS SCIENCE. Simplified Dual Damascene Process Utilizing PPMSO As an Insulator Layer. 2012.
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