Rotational stage for high speed, large area scanning in focused beam systems

US6911656

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Bibliographic Details
Main Authors:	LIU, YONG YU, CHAN, DANIEL S. H., PHANG, JACOB C. H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32706
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-32706
record_format	dspace
spelling	sg-nus-scholar.10635-327062015-07-29T07:03:54Z Rotational stage for high speed, large area scanning in focused beam systems LIU, YONG YU CHAN, DANIEL S. H. PHANG, JACOB C. H. ELECTRICAL & COMPUTER ENGINEERING NATIONAL UNIVERSITY OF SINGAPORE US6911656 Granted Patent 2012-05-02T02:29:10Z 2012-05-02T02:29:10Z 2005-06-28 Patent LIU, YONG YU,CHAN, DANIEL S. H.,PHANG, JACOB C. H. (2005-06-28). Rotational stage for high speed, large area scanning in focused beam systems. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32706 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	US6911656
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING LIU, YONG YU CHAN, DANIEL S. H. PHANG, JACOB C. H.
format	Patent
author	LIU, YONG YU CHAN, DANIEL S. H. PHANG, JACOB C. H.
spellingShingle	LIU, YONG YU CHAN, DANIEL S. H. PHANG, JACOB C. H. Rotational stage for high speed, large area scanning in focused beam systems
author_sort	LIU, YONG YU
title	Rotational stage for high speed, large area scanning in focused beam systems
title_short	Rotational stage for high speed, large area scanning in focused beam systems
title_full	Rotational stage for high speed, large area scanning in focused beam systems
title_fullStr	Rotational stage for high speed, large area scanning in focused beam systems
title_full_unstemmed	Rotational stage for high speed, large area scanning in focused beam systems
title_sort	rotational stage for high speed, large area scanning in focused beam systems
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32706
_version_	1681081272145805312

Rotational stage for high speed, large area scanning in focused beam systems

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