APA Citation

VLADIMIRSKY, Y., BOURDILLON, A., & SOURCE, S. S. L. (2012). ULTRA HIGH RESOLUTION LITHOGRAPHIC IMAGING AND PRINTING AND DEFECT REDUCTION BY EXPOSURE NEAR THE CRITICAL CONDITION.

Chicago Style Citation

VLADIMIRSKY, YULI, ANTONY BOURDILLON, and SINGAPORE SYNCHROTRON LIGHT SOURCE. ULTRA HIGH RESOLUTION LITHOGRAPHIC IMAGING AND PRINTING AND DEFECT REDUCTION BY EXPOSURE NEAR THE CRITICAL CONDITION. 2012.

MLA Citation

VLADIMIRSKY, YULI, ANTONY BOURDILLON, and SINGAPORE SYNCHROTRON LIGHT SOURCE. ULTRA HIGH RESOLUTION LITHOGRAPHIC IMAGING AND PRINTING AND DEFECT REDUCTION BY EXPOSURE NEAR THE CRITICAL CONDITION. 2012.

Warning: These citations may not always be 100% accurate.