Aberration characteristics of immersion lenses for LVSEM

10.1016/S0304-3991(02)00288-7

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Bibliographic Details
Main Author:	Khursheed, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Immersion lenses Low voltage scanning electron microscopy (LVSEM) On-axis aberrations
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54856
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54856
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spelling	sg-nus-scholar.10635-548562023-10-30T21:28:03Z Aberration characteristics of immersion lenses for LVSEM Khursheed, A. ELECTRICAL & COMPUTER ENGINEERING Immersion lenses Low voltage scanning electron microscopy (LVSEM) On-axis aberrations 10.1016/S0304-3991(02)00288-7 Ultramicroscopy 93 3-4 331-338 ULTRD 2014-06-17T02:36:19Z 2014-06-17T02:36:19Z 2002-12 Article Khursheed, A. (2002-12). Aberration characteristics of immersion lenses for LVSEM. Ultramicroscopy 93 (3-4) : 331-338. ScholarBank@NUS Repository. https://doi.org/10.1016/S0304-3991(02)00288-7 03043991 http://scholarbank.nus.edu.sg/handle/10635/54856 000179694900014 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Immersion lenses Low voltage scanning electron microscopy (LVSEM) On-axis aberrations
spellingShingle	Immersion lenses Low voltage scanning electron microscopy (LVSEM) On-axis aberrations Khursheed, A. Aberration characteristics of immersion lenses for LVSEM
description	10.1016/S0304-3991(02)00288-7
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Khursheed, A.
format	Article
author	Khursheed, A.
author_sort	Khursheed, A.
title	Aberration characteristics of immersion lenses for LVSEM
title_short	Aberration characteristics of immersion lenses for LVSEM
title_full	Aberration characteristics of immersion lenses for LVSEM
title_fullStr	Aberration characteristics of immersion lenses for LVSEM
title_full_unstemmed	Aberration characteristics of immersion lenses for LVSEM
title_sort	aberration characteristics of immersion lenses for lvsem
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54856
_version_	1781412035487072256

Aberration characteristics of immersion lenses for LVSEM

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