Tay, C., Quan, C., Gopal, M., Shen, L., Akkipeddi, R., & ENGINEERING, M. (2014). Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures.
استشهاد بنمط شيكاغوTay, C.J., C. Quan, M. Gopal, L. Shen, R. Akkipeddi, و MECHANICAL ENGINEERING. Nanoindentation Techniques in the Measurement of Mechanical Properties of InP-based Free-standing MEMS Structures. 2014.
MLA استشهادTay, C.J., et al. Nanoindentation Techniques in the Measurement of Mechanical Properties of InP-based Free-standing MEMS Structures. 2014.
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