Surface roughness investigation of semi-conductor wafers

• Main Authors: Tay, C.J., Wang, S.H., Quan, C., Ng, B.L., Chan, K.C.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Atomic force microscope (AFM); Light scattering; Non-contact measurement; Surface roughness; Total integrated scattering (TIS)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/61440
• Institution: National University of Singapore

10.1016/j.optlastec.2003.12.010