Ho, W., Tay, A., Schaper, C., & ENGINEERING, E. (2014). Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates.
استشهاد بنمط شيكاغوHo, W.K., A. Tay, C.D Schaper, و ELECTRICAL ENGINEERING. Optimal Predictive Control With Constraints for the Processing of Semiconductor Wafers On Bake Plates. 2014.
MLA استشهادHo, W.K., A. Tay, C.D Schaper, و ELECTRICAL ENGINEERING. Optimal Predictive Control With Constraints for the Processing of Semiconductor Wafers On Bake Plates. 2014.
تحذير: قد لا تكون هذه الاستشهادات دائما دقيقة بنسبة 100%.