Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates

Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Bibliographic Details
Main Authors: Yang, G.H., Oh, S.W., Kang, E.T., Neoh, K.G.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/66752
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Institution: National University of Singapore
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Summary:Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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