Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Bibliographic Details
Main Authors:	Yang, G.H., Oh, S.W., Kang, E.T., Neoh, K.G.
Other Authors:	CHEMICAL & ENVIRONMENTAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/66752
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-667522023-08-29T09:52:47Z Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates Yang, G.H. Oh, S.W. Kang, E.T. Neoh, K.G. CHEMICAL & ENVIRONMENTAL ENGINEERING Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 20 6 1955-1963 JVTAD 2014-06-17T08:34:02Z 2014-06-17T08:34:02Z 2002-11 Article Yang, G.H., Oh, S.W., Kang, E.T., Neoh, K.G. (2002-11). Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 20 (6) : 1955-1963. ScholarBank@NUS Repository. 07342101 http://scholarbank.nus.edu.sg/handle/10635/66752 000179441700020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
author2	CHEMICAL & ENVIRONMENTAL ENGINEERING
author_facet	CHEMICAL & ENVIRONMENTAL ENGINEERING Yang, G.H. Oh, S.W. Kang, E.T. Neoh, K.G.
format	Article
author	Yang, G.H. Oh, S.W. Kang, E.T. Neoh, K.G.
spellingShingle	Yang, G.H. Oh, S.W. Kang, E.T. Neoh, K.G. Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
author_sort	Yang, G.H.
title	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_short	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_full	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_fullStr	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_full_unstemmed	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_sort	plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/66752
_version_	1776257012628193280

Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates

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