Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates

• Main Authors: Yang, G.H., Oh, S.W., Kang, E.T., Neoh, K.G.
• Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/66752
• Institution: National University of Singapore

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films