A CMOS fully-integrated low-voltage vibratory microgyroscope

• Main Authors: Liang, Y.C., Zhao, T., Xu, Y.P., Boh, S.S.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 主題: ASIC; Comb drive; Microgyroscope; Parallel plate actuation
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/68731

IEEE Region 10 International Conference on Electrical and Electronic Technology