Ho, W. K., Tay, A., Schaper, C. D., & ENGINEERING, E. (2014). Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks.
Chicago Style CitationHo, Weng Khuen, Arthur Tay, Charles D. Schaper, and ELECTRICAL ENGINEERING. Optimal Control of Conductive Heating Systems for Microelectronics Processing of Silicon Wafers and Quartz Photomasks. 2014.
MLA引文Ho, Weng Khuen, Arthur Tay, Charles D. Schaper, and ELECTRICAL ENGINEERING. Optimal Control of Conductive Heating Systems for Microelectronics Processing of Silicon Wafers and Quartz Photomasks. 2014.
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