Ho, W. K., Tay, A., Schaper, C. D., & ENGINEERING, E. (2014). Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks.
استشهاد بنمط شيكاغوHo, Weng Khuen, Arthur Tay, Charles D. Schaper, و ELECTRICAL ENGINEERING. Optimal Control of Conductive Heating Systems for Microelectronics Processing of Silicon Wafers and Quartz Photomasks. 2014.
MLA استشهادHo, Weng Khuen, Arthur Tay, Charles D. Schaper, و ELECTRICAL ENGINEERING. Optimal Control of Conductive Heating Systems for Microelectronics Processing of Silicon Wafers and Quartz Photomasks. 2014.
تحذير: قد لا تكون هذه الاستشهادات دائما دقيقة بنسبة 100%.