Tan, S., Lin, Q., Tay, C., Quan, C., & ENGINEERING, M. (2014). Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology.

Tan, S.K., Q. Lin, C.J Tay, C. Quan, و MECHANICAL ENGINEERING. Characterization of Assist Features On Impact of Mask Error Enhancement Factors for Sub-0.13 Um Technology. 2014.

Tan, S.K., et al. Characterization of Assist Features On Impact of Mask Error Enhancement Factors for Sub-0.13 Um Technology. 2014.