Tan, S., Lin, Q., Quan, C., Tay, C., & ENGINEERING, M. (2014). Impact of transmission error for attenuated phase shift mask for 0.10 um Technology.

Tan, S.K., Q. Lin, C. Quan, C.J Tay, و MECHANICAL ENGINEERING. Impact of Transmission Error for Attenuated Phase Shift Mask for 0.10 Um Technology. 2014.

Tan, S.K., et al. Impact of Transmission Error for Attenuated Phase Shift Mask for 0.10 Um Technology. 2014.