Tay, C., Quan, C., Akkipeddi, R., Gopal, M., & ENGINEERING, M. (2014). Residual stress and profile evaluation on an optical MEMS device.
استشهاد بنمط شيكاغوTay, C.J., C. Quan, R. Akkipeddi, M. Gopal, و MECHANICAL ENGINEERING. Residual Stress and Profile Evaluation On an Optical MEMS Device. 2014.
MLA استشهادTay, C.J., et al. Residual Stress and Profile Evaluation On an Optical MEMS Device. 2014.
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