Tay, C., Quan, C., Akkipeddi, R., Gopal, M., & ENGINEERING, M. (2014). Residual stress and profile evaluation on an optical MEMS device.
Chicago Style CitationTay, C.J., C. Quan, R. Akkipeddi, M. Gopal, and MECHANICAL ENGINEERING. Residual Stress and Profile Evaluation On an Optical MEMS Device. 2014.
MLA引文Tay, C.J., et al. Residual Stress and Profile Evaluation On an Optical MEMS Device. 2014.
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