Zheng, Y., Lu, Y., Mai, Z., Song, W., & ENGINEERING, E. (2014). Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser.
Chicago Style CitationZheng, Y.-W., Y.-F Lu, Z.-H Mai, W.-D Song, and ELECTRICAL ENGINEERING. Removing Spherical Silica Particles From Si, Ge and NiP Substrates By KrF Excimer Laser. 2014.
MLA CitationZheng, Y.-W., et al. Removing Spherical Silica Particles From Si, Ge and NiP Substrates By KrF Excimer Laser. 2014.
Warning: These citations may not always be 100% accurate.