Koh, A., Lee, R., Liu, F., Liow, T., Tan, K., Wang, X., . . . ENGINEERING, E. &. C. (2014). Pulsed laser annealing of silicon-carbon source/drain in MuGFETs for enhanced dopant activation and high substitutional carbon concentration.
Chicago Style CitationKoh, A.T.-Y., et al. Pulsed Laser Annealing of Silicon-carbon Source/drain in MuGFETs for Enhanced Dopant Activation and High Substitutional Carbon Concentration. 2014.
MLA引文Koh, A.T.-Y., et al. Pulsed Laser Annealing of Silicon-carbon Source/drain in MuGFETs for Enhanced Dopant Activation and High Substitutional Carbon Concentration. 2014.
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