Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers

10.1116/1.2137329

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Bibliographic Details
Main Authors:	Bera, M.K., Chakraborty, S., Das, R., Dalapati, G.K., Chattopadhyay, S., Samanta, S.K., Yoo, W.J., Chakraborty, A.K., Butenko, Y., Šiller, L., Hunt, M.R.C., Saha, S., Maiti, C.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82967
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82967
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spelling	sg-nus-scholar.10635-829672023-10-29T22:24:34Z Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers Bera, M.K. Chakraborty, S. Das, R. Dalapati, G.K. Chattopadhyay, S. Samanta, S.K. Yoo, W.J. Chakraborty, A.K. Butenko, Y. Šiller, L. Hunt, M.R.C. Saha, S. Maiti, C.K. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.2137329 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 24 1 84-90 JVTAD 2014-10-07T04:35:38Z 2014-10-07T04:35:38Z 2006-01 Article Bera, M.K., Chakraborty, S., Das, R., Dalapati, G.K., Chattopadhyay, S., Samanta, S.K., Yoo, W.J., Chakraborty, A.K., Butenko, Y., Šiller, L., Hunt, M.R.C., Saha, S., Maiti, C.K. (2006-01). Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 24 (1) : 84-90. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2137329 07342101 http://scholarbank.nus.edu.sg/handle/10635/82967 000234814100013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.2137329
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Bera, M.K. Chakraborty, S. Das, R. Dalapati, G.K. Chattopadhyay, S. Samanta, S.K. Yoo, W.J. Chakraborty, A.K. Butenko, Y. Šiller, L. Hunt, M.R.C. Saha, S. Maiti, C.K.
format	Article
author	Bera, M.K. Chakraborty, S. Das, R. Dalapati, G.K. Chattopadhyay, S. Samanta, S.K. Yoo, W.J. Chakraborty, A.K. Butenko, Y. Šiller, L. Hunt, M.R.C. Saha, S. Maiti, C.K.
spellingShingle	Bera, M.K. Chakraborty, S. Das, R. Dalapati, G.K. Chattopadhyay, S. Samanta, S.K. Yoo, W.J. Chakraborty, A.K. Butenko, Y. Šiller, L. Hunt, M.R.C. Saha, S. Maiti, C.K. Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers
author_sort	Bera, M.K.
title	Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers
title_short	Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers
title_full	Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers
title_fullStr	Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers
title_full_unstemmed	Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers
title_sort	rapid thermal oxidation of ge-rich si1-xgex heterolayers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82967
_version_	1781784262746308608

Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers

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