Text this: Comparative study of copper films prepared by ionized metal plasma sputtering and chemical vapor deposition in the Cu/TaN/SiO2/Si multilayer structure

            ______   ______    _    _     _____   
  ____     /_   _// |      \\ | || | ||  |__  //  
 |    \\    -| ||-  |  --  // | || | ||    / //   
 | [] ||    _| ||_  |  --  \\ | \\_/ ||   / //__  
 |  __//   /_____// |______//  \____//   /_____|| 
 |_|`-`    `-----`  `------`    `---`    `-----`  
 `-`