Evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates
10.1063/1.1782959
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2014
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sg-nus-scholar.10635-965262023-10-31T20:24:18Z Evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates Yeo, K.L. Wee, A.T.S. Chong, Y.F. PHYSICS 10.1063/1.1782959 Journal of Applied Physics 96 7 3692-3695 JAPIA 2014-10-16T09:24:27Z 2014-10-16T09:24:27Z 2004-10-01 Article Yeo, K.L., Wee, A.T.S., Chong, Y.F. (2004-10-01). Evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates. Journal of Applied Physics 96 (7) : 3692-3695. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1782959 00218979 http://scholarbank.nus.edu.sg/handle/10635/96526 000224145800014 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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| description |
10.1063/1.1782959 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Yeo, K.L. Wee, A.T.S. Chong, Y.F. |
| format |
Article |
| author |
Yeo, K.L. Wee, A.T.S. Chong, Y.F. |
| spellingShingle |
Yeo, K.L. Wee, A.T.S. Chong, Y.F. Evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates |
| author_sort |
Yeo, K.L. |
| title |
Evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates |
| title_short |
Evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates |
| title_full |
Evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates |
| title_fullStr |
Evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates |
| title_full_unstemmed |
Evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates |
| title_sort |
evaluation of back-side secondary ion mass spectrometry for boron diffusion in silicon and silicon-on-insulator substrates |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96526 |
| _version_ |
1781786483166806016 |