Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon

Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon

10.1016/j.nimb.2010.01.015

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Bibliographic Details
Main Authors: Ow, Y.S., Breese, M.B.H., Leng, Y.R., Azimi, S., Teo, E.J., Sun, X.W.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Computer generated holograms
Holography
Ion beam irradiation
Micromachining
Silicon
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97194
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Institution: National University of Singapore
Description
Summary:10.1016/j.nimb.2010.01.015

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