Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions

10.1016/j.nimb.2005.01.052

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Bibliographic Details
Main Authors:	Van Kan, J.A., Shao, P.G., Molter, P., Saumer, M., Bettiol, A.A., Osipowicz, T., Watt, F.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Direct write Nuclear microscopy Proton beam writing Resolution standard
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98703
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98703
record_format	dspace
spelling	sg-nus-scholar.10635-987032023-10-30T08:26:40Z Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions Van Kan, J.A. Shao, P.G. Molter, P. Saumer, M. Bettiol, A.A. Osipowicz, T. Watt, F. PHYSICS Direct write Nuclear microscopy Proton beam writing Resolution standard 10.1016/j.nimb.2005.01.052 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 1-4 170-175 NIMBE 2014-10-16T09:50:23Z 2014-10-16T09:50:23Z 2005-04 Conference Paper Van Kan, J.A., Shao, P.G., Molter, P., Saumer, M., Bettiol, A.A., Osipowicz, T., Watt, F. (2005-04). Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 170-175. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.052 0168583X http://scholarbank.nus.edu.sg/handle/10635/98703 000229752400029 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Direct write Nuclear microscopy Proton beam writing Resolution standard
spellingShingle	Direct write Nuclear microscopy Proton beam writing Resolution standard Van Kan, J.A. Shao, P.G. Molter, P. Saumer, M. Bettiol, A.A. Osipowicz, T. Watt, F. Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions
description	10.1016/j.nimb.2005.01.052
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Shao, P.G. Molter, P. Saumer, M. Bettiol, A.A. Osipowicz, T. Watt, F.
format	Conference or Workshop Item
author	Van Kan, J.A. Shao, P.G. Molter, P. Saumer, M. Bettiol, A.A. Osipowicz, T. Watt, F.
author_sort	Van Kan, J.A.
title	Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions
title_short	Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions
title_full	Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions
title_fullStr	Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions
title_full_unstemmed	Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions
title_sort	fabrication of a free standing resolution standard for focusing mev ion beams to sub 30 nm dimensions
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98703
_version_	1781786933085601792

Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions

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