Lee, J. S., Jin, S. B., Vichiansan, N., Han, J. G., Hori, M., & Leksakul, K. (2018). SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures.
Chicago Style CitationLee, Jun S., Su B. Jin, N. Vichiansan, Jeon G. Han, M. Hori, and K. Leksakul. SiC<inf>x</inf>H<inf>y</inf>-based Hydrophobic Thin Films With Good Chemical and Mechanical Properties Synthesized By PECVD At Various Substrate Temperatures. 2018.
MLA CitationLee, Jun S., et al. SiC<inf>x</inf>H<inf>y</inf>-based Hydrophobic Thin Films With Good Chemical and Mechanical Properties Synthesized By PECVD At Various Substrate Temperatures. 2018.
Warning: These citations may not always be 100% accurate.