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 /  ___||   / _ \\   |__  //    / _ \\    ____    
| // __    | / \ ||    / //    / //\ \\  |    \\  
| \\_\ ||  | \_/ ||   / //__  |  ___  || | [] ||  
 \____//    \___//   /_____|| |_||  |_|| |  __//  
  `---`     `---`    `-----`  `-`   `-`  |_|`-`   
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Text this: SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures